Investigation of a Flat Connector Concept Potential for Low and Medium Vacuum Conditions
DOI :
https://doi.org/10.5324/nordis.v0i25.2358Mots-clés :
PD, Low voltageRésumé
Higher actuator voltages are required for future generation lithography machines to increase productivity. The operating pressures in combination with relevant insulation distances, can be situated near gas breakdown and cause partial discharge activity, making long-term damage conceivable. High voltage cone-shape connectors with pliable insulation can be applied for the low and medium vacuum range. However, materials and space are restricted making a cone shaped connector not ideal. In this paper, a flat connector concept is presented with a pliable insulation material allowed to be used for the aforementioned application. The permittivity of this material is measured and simulation results of the connector reveal critical design points. A prototype connector is made and its partial discharge inception voltage is characterized for the low and medium vacuum range. The results are discussed and compared with simulations.
Téléchargements
Téléchargements
Publié-e
Numéro
Rubrique
Licence
Proceedings of the Nordic Insulation Symposium licenses all content of the journal under a Creative Commons Attribution (CC-BY) licence. This means, among other things, that anyone is free to copy and distribute the content, as long as they give proper credit to the author(s) and the journal. For further information, see Creative Commons website for human readable or lawyer readable versions.
Authors who publish with this journal agree to the following terms:
1. Authors retain copyright and grant the journal right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.
2. Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgement of its initial publication in this journal.
3. Authors are permitted and encouraged to post their work online (e.g., in institutional repositories or on their website) prior to and during the submission process, as it can lead to productive exchanges, as well as earlier and greater citation of published work (See The Effect of Open Access).
