Equipment available in NTNU NanoLab

For detail information regarding each instrument, see  norfab.no/nanolab
This list was updated 19.06.2013.

Characterization
• AFM, Nanosurf
• AFM, Nanosurf Flex
• AFM, Veeco
• DIC microscope
• Focused Ion Beam (FIB) Dual Beam SEM
• Nanosight
• Particle Size Analyzer
• Profilometer
• Reflectometer
• S(T)EM
• Scanning Electrochemical microscope (SECM)
• SEM (Table Top)
• Stereomicroscope
• STM, Nanosurf
• Yellow Light Microscope

Thermal Processes
• Rapid Thermal Processing (RTP) Oven
• Calcination (gold) Furnace
• Drying Ovens
• Microwave Oven
• Autoclaves

Lithography
• Electron Beam Lithography (EBL)
• Photolithography  with maskaligner EVG620, MA6 and MJB3
• Nanoimprinting with EVG620 and MA6 SCIL
• Soft lithography

Deposition
• Carbon Coater for SEM sample preparation
• Dip Coaters
• E-Beam Evaporator
• PECVD
Thermal chemical vapor deposition (T-CVD)
• Spin Coaters
• Sputter Coater and Thermal Evaporator
• Sputter Coater for SEM sample preparation
• Langmuir-Blodgett trough

Etching, dry and wet
• HF-fumehood
• Inductive Coupled Plasma Reactive Ion Etch (ICP-RIE)
• Plasma Cleaner
• UV Ozone cleaner

Other
• Autoclaves
• Glove Boxes
• Heidolph rotary evaporators
• Laminar Air Flow Benches
• PDMS area
• Safety bench
• Sartorius Analytical Balances
• Sartorius Precision Balances
• Dicing Saw
• Scriber
• Surface Plasmon Resonance
• Ultracentrifuge
• Ultrasound Desintegrator
• Wire Bonder
• WTW pH-meter

Informasjon om renrommet